夏菁菁
- 教师英文名称： Jingjing Xia
- 教师拼音名称： Xia Jingjing
- 学历： 博士研究生毕业
- 学位： 博士学位
- 毕业院校： 同济大学
访问量：0000019036
开通时间：..
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研究领域
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化学机械抛光，原子层沉积，光学检测
论文成果
- [ 1 ]夏菁菁,Extraction of isotropic and anisotropic components for optical surface micro-metrology based on the two-dimensional power spectral density analysis.Precision Engineering,
- [ 2 ]Improving monocrystalline silicon surface quality with chemical mechanical polishing using the slurry with the additive of isopropanol.Colloids and Surfaces A: Physicochemical and Engineering Aspects,
- [ 3 ]Investigating the partial plastic formation mechanism of typical scratches on silicon wafers induced by rogue particles during chemical mechanical polishing.Materials Science in Semiconductor Processing,
- [ 4 ]夏菁菁,Surface Morphology Evolution during Chemical Mechanical Polishing Based on Microscale Material Removal Modeling for Monocrystalline Silicon.ST ALBAN-ANLAGE 66, CH-4052 BASEL, SWITZERLAND:MATERIALS,2022,15(16):
专利
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著作成果
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科研项目
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