同济大学主页平台管理系统夏菁菁--中文主页-- Extraction of isotropic and anisotropic components for optical surface micro-metrology based on the two-dimensional power spectral density analysis

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Extraction of isotropic and anisotropic components for optical surface micro-metrology based on the two-dimensional power spectral density analysis

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发表刊物：Precision Engineering

关键字：Anisotropic surfaces; Isotropic surfaces; Machined processing surfaces; Optical surface specification; Power spectral density

第一作者：夏菁菁

论文类型：期刊论文

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