夏菁菁
- 教师英文名称： Jingjing Xia
- 教师拼音名称： Xia Jingjing
- 学历： 博士研究生毕业
- 学位： 博士学位
- 毕业院校： 同济大学
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Improving monocrystalline silicon surface quality with chemical mechanical polishing using the slurry with the additive of isopropanol
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发表刊物：Colloids and Surfaces A: Physicochemical and Engineering Aspects
关键字：Monocrystalline silicon;Chemical mechanical polish; chemical mechanical polishing; material removal rate; monocrystalline silicon
论文类型：期刊论文
通讯作者：夏菁菁
是否译文：否
上一条：Extraction of isotropic and anisotropic components for optical surface micro-metrology based on the two-dimensional power spectral density analysis
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