Jingjing Xia
Education Level: Doctor′s Degree graduated
Degree: Doctor Degree
Alma Mater: 同济大学
Scientific Research
Research Field
CMP; ALD; Optical Measurement
Achievements of The Thesis
- Jingjing Xia,Extraction of isotropic and anisotropic components for optical surface micro-metrology based on the two-dimensional power spectral density analysisPrecision Engineering,
- Jingjing Xia.Improving monocrystalline silicon surface quality with chemical mechanical polishing using the slurry with the additive of isopropanolColloids and Surfaces A: Physicochemical and Engineering Aspects,
- Jingjing Xia.Investigating the partial plastic formation mechanism of typical scratches on silicon wafers induced by rogue particles during chemical mechanical polishingMaterials Science in Semiconductor Processing,
- Jingjing Xia,Surface Morphology Evolution during Chemical Mechanical Polishing Based on Microscale Material Removal Modeling for Monocrystalline SiliconST ALBAN-ANLAGE 66, CH-4052 BASEL, SWITZERLAND:MATERIALS,2022,15(16):
Patents
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Published Books
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Research Projects
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