Extraction of isotropic and anisotropic components for optical surface micro-metrology based on the two-dimensional power spectral density analysis
Release time:2024-10-17
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Journal:Precision Engineering
Key Words:Anisotropic surfaces; Isotropic surfaces; Machined processing surfaces; Optical surface specification; Power spectral density
First Author:Jingjing Xia
Indexed by:Article
Translation or Not:no