Improving Thickness Uniformity of Mo/Si Multilayers on Curved Spherical Substrates by a Masking Technique
Release time:2024-10-25
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DOI number:10.3390/coatings9120851
Affiliation of Author(s):物理科学与工程学院
Journal:Coatings
Indexed by:Periodical papers
Document Code:851
Discipline:Science
Document Type:J
Volume:9
Issue:12
Translation or Not:no
Date of Publication:2019-12-12
Included Journals:SCI(E)