Improving Thickness Uniformity of Mo/Si Multilayers on Curved Spherical Substrates by a Masking Technique
Release time:2024-10-25
Hits:
DOI number:10.1063/1.5044752
Affiliation of Author(s):物理科学与工程学院
Journal:Review of Scientific Instruments
Indexed by:Periodical papers
Document Code:103109
Discipline:Science
Document Type:J
Volume:89
Translation or Not:no
Date of Publication:2018-10-18
Included Journals:SCI(E)