The influence of background pressure on microstructure and chemical state of WC/SiC multilayers prepared by magnetron sputtering
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Affiliation of Author(s):物理科学与工程学院
Journal:SURFACE & COATINGS TECHNOLOGY
Place of Publication:PO BOX 564, 1001 LAUSANNE, SWITZERLAND
Co-author:ZheZhang
Indexed by:Periodical papers
Volume:507
ISSN No.:0257-8972
Translation or Not:no
Date of Publication:2025-01-01
Included Journals:SCOPUS、CNKI、WOS