Impact of Mo Barrier Layers on the Interface and Microstructure of Al/Sc Multilayers for the Extreme Ultraviolet Range
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Impact Factor:8.2
Affiliation of Author(s):物理科学与工程学院
Journal:ACS Applied Materials and Interfaces
Place of Publication:1155 16TH ST, NW, WASHINGTON, DC 20036 USA
Indexed by:Periodical papers
Correspondence Author:ZheZhang
Volume:17
Issue:14
Page Number:21975 - 21984
ISSN No.:1944-8244
Translation or Not:no
Date of Publication:2025-01-01
Included Journals:EI、SCOPUS、PUBMED、CNKI、WOS