Fabrication and characterization of TiO2 and SiO2 as protective coating for Mo/Si multilayer by ion beam sputtering
Impact Factor:3.9
Affiliation of Author(s):物理科学与工程学院
Journal:Vacuum
Indexed by:Periodical papers
Correspondence Author:ZheZhang
Volume:238
ISSN No.:0042-207X
Translation or Not:no
Date of Publication:2025-01-01
Included Journals:CNKI、EI、WOS、SCOPUS



