Fabrication and characterization of TiO2 and SiO2 as protective coating for Mo/Si multilayer by ion beam sputtering
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Affiliation of Author(s):物理科学与工程学院
Journal:VACUUM
Place of Publication:THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND
Indexed by:Periodical papers
Correspondence Author:ZheZhang
Volume:238
ISSN No.:0042-207X
Translation or Not:no
Date of Publication:2025-01-01
Included Journals:SCOPUS、EI、CNKI、WOS