浸没式光刻系统流场控制技术
Zhicheng YUAN
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
E-Mail:
Administrative Position: Distinguished Researcher
Education Level: Doctor′s Degree graduated
Degree: Doctor of Engineering
Alma Mater: Kyoto University
Discipline:
Thermal Power Engineering
Energy and Power Engineering
Power Engineering and Engineering Thermophysics
Fluid Machinery and Engineering
Research Focus
Current Location:
Home
> Research Focus