极紫外正入射光学系统研究进展
Affiliation of Author(s):物理科学与工程学院
Journal:光学精密工程
Co-author:Shengzhen Yi
Indexed by:Periodical papers
Volume:30
Issue:21
Page Number:2678-2687
ISSN No.:1004-924X
Translation or Not:no
Date of Publication:2022-01-01
Included Journals:CNKI、CSCD、EI、CQVIP、CNKI、WANFANG、SCOPUS
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