微纳加工技术、集成电路标准物质研制与定值
负责各种微纳器件的加工技术研究，集成电路领域晶圆级标准物质的研制与定值等技术探索
YuyingXie
Education Level: Doctor′s Degree graduated
Degree: Doctor Degree
Alma Mater: 复旦大学
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